IC compatible wafer level fabrication of silicon nanowire field effect transistors for biosensing applications

T Moh Shan Yau

Research output: Thesis › Dissertation (TU Delft)

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Sarro, P.M., Supervisor Sudhölter, E.J.R., Advisor de Smet, Louis, Advisor
Award date	9 Dec 2013
Place of Publication	Rotterdam
Publisher	Ridderprint bv
Print ISBNs	978-90-5335-773-6
DOIs	https://doi.org/10.4233/uuid:5674b9ff-4ee7-4c74-8244-32384c6224d6
Publication status	Published - 2013

Access to Document

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