Implementation of CMOS-compatible Metamaterial Absorber for gas Sensing Application

E. Karimi Shahmarvandi; M. Ghaderi; P. Ayerden; G. de Graaf; R.F. Wolffenbuttel

doi:10.1016/j.proeng.2016.11.433

Implementation of CMOS-compatible Metamaterial Absorber for gas Sensing Application

E. Karimi Shahmarvandi, M. Ghaderi, P. Ayerden, G. de Graaf, R.F. Wolffenbuttel

Electronic Instrumentation

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Abstract

The design of a metamaterial-based absorber for use in a mid-IR microspectrometer-based gas sensor is reported.The microspectrometer consists of a linear variable optical filter (LVOF) that is aligned with an array of thermopiledetectors, which is fabricated on a SiN membrane and covered with the absorber. Special emphasis was put on theCMOS compatible fabrication, which resulted in an absorber design based on aluminium disk resonators and analuminium background plane that are separated by a SiO2 layer. The fabrication process is described, and thechallenges are discussed.

Original language	English
Pages (from-to)	1241-1244
Number of pages	4
Journal	Procedia Engineering
Volume	168
DOIs	https://doi.org/10.1016/j.proeng.2016.11.433
Publication status	Published - 2016
Event	Eurosensors 2016: The 30th anniversary Eurosensors Conference - Budapest, Hungary Duration: 4 Sept 2016 → 7 Sept 2016

Keywords

Gas sensing
Microspectrometer
Metamaterial absorber
Mid-infrared

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10.1016/j.proeng.2016.11.433

1-s2.0-S187770581633747X-mainFinal published version, 591 KBLicence: CC BY-NC-ND

Cite this

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title = "Implementation of CMOS-compatible Metamaterial Absorber for gas Sensing Application",

abstract = "The design of a metamaterial-based absorber for use in a mid-IR microspectrometer-based gas sensor is reported.The microspectrometer consists of a linear variable optical filter (LVOF) that is aligned with an array of thermopiledetectors, which is fabricated on a SiN membrane and covered with the absorber. Special emphasis was put on theCMOS compatible fabrication, which resulted in an absorber design based on aluminium disk resonators and analuminium background plane that are separated by a SiO2 layer. The fabrication process is described, and thechallenges are discussed. ",

keywords = "Gas sensing, Microspectrometer, Metamaterial absorber, Mid-infrared",

author = "Shahmarvandi, {E. Karimi} and M. Ghaderi and P. Ayerden and {de Graaf}, G. and R.F. Wolffenbuttel",

year = "2016",

doi = "10.1016/j.proeng.2016.11.433",

language = "English",

volume = "168",

pages = "1241--1244",

journal = "Procedia Engineering",

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publisher = "Elsevier",

note = "Eurosensors 2016 : The 30th anniversary Eurosensors Conference ; Conference date: 04-09-2016 Through 07-09-2016",

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T1 - Implementation of CMOS-compatible Metamaterial Absorber for gas Sensing Application

AU - Shahmarvandi, E. Karimi

AU - Ghaderi, M.

AU - Ayerden, P.

AU - de Graaf, G.

AU - Wolffenbuttel, R.F.

PY - 2016

Y1 - 2016

N2 - The design of a metamaterial-based absorber for use in a mid-IR microspectrometer-based gas sensor is reported.The microspectrometer consists of a linear variable optical filter (LVOF) that is aligned with an array of thermopiledetectors, which is fabricated on a SiN membrane and covered with the absorber. Special emphasis was put on theCMOS compatible fabrication, which resulted in an absorber design based on aluminium disk resonators and analuminium background plane that are separated by a SiO2 layer. The fabrication process is described, and thechallenges are discussed.

AB - The design of a metamaterial-based absorber for use in a mid-IR microspectrometer-based gas sensor is reported.The microspectrometer consists of a linear variable optical filter (LVOF) that is aligned with an array of thermopiledetectors, which is fabricated on a SiN membrane and covered with the absorber. Special emphasis was put on theCMOS compatible fabrication, which resulted in an absorber design based on aluminium disk resonators and analuminium background plane that are separated by a SiO2 layer. The fabrication process is described, and thechallenges are discussed.

KW - Gas sensing

KW - Microspectrometer

KW - Metamaterial absorber

KW - Mid-infrared

UR - http://resolver.tudelft.nl/uuid:83771961-1e45-4240-a3ee-8e9b7b6a267a

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DO - 10.1016/j.proeng.2016.11.433

M3 - Conference article

SN - 1877-7058

VL - 168

SP - 1241

EP - 1244

JO - Procedia Engineering

JF - Procedia Engineering

T2 - Eurosensors 2016

Y2 - 4 September 2016 through 7 September 2016

ER -

Implementation of CMOS-compatible Metamaterial Absorber for gas Sensing Application

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