Implementation of CMOS-compatible Metamaterial Absorber for gas Sensing Application

E. Karimi Shahmarvandi, M. Ghaderi, P. Ayerden, G. de Graaf, R.F. Wolffenbuttel

Research output: Contribution to journalConference articleScientificpeer-review

4 Citations (Scopus)
15 Downloads (Pure)

Abstract

The design of a metamaterial-based absorber for use in a mid-IR microspectrometer-based gas sensor is reported.The microspectrometer consists of a linear variable optical filter (LVOF) that is aligned with an array of thermopiledetectors, which is fabricated on a SiN membrane and covered with the absorber. Special emphasis was put on theCMOS compatible fabrication, which resulted in an absorber design based on aluminium disk resonators and analuminium background plane that are separated by a SiO2 layer. The fabrication process is described, and thechallenges are discussed.
Original languageEnglish
Pages (from-to)1241-1244
Number of pages4
JournalProcedia Engineering
Volume168
DOIs
Publication statusPublished - 2016
EventEurosensors 2016: The 30th anniversary Eurosensors Conference - Budapest, Hungary
Duration: 4 Sep 20167 Sep 2016

Keywords

  • Gas sensing
  • Microspectrometer
  • Metamaterial absorber
  • Mid-infrared

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