The design of a metamaterial-based absorber for use in a mid-IR microspectrometer-based gas sensor is reported.The microspectrometer consists of a linear variable optical filter (LVOF) that is aligned with an array of thermopiledetectors, which is fabricated on a SiN membrane and covered with the absorber. Special emphasis was put on theCMOS compatible fabrication, which resulted in an absorber design based on aluminium disk resonators and analuminium background plane that are separated by a SiO2 layer. The fabrication process is described, and thechallenges are discussed.
|Number of pages||4|
|Publication status||Published - 2016|
|Event||Eurosensors 2016: The 30th anniversary Eurosensors Conference - Budapest, Hungary|
Duration: 4 Sep 2016 → 7 Sep 2016
- Gas sensing
- Metamaterial absorber