Implementation of Fully Coupled Electromigration Theory in COMSOL

Zhen Cui; Xuejun Fan; Kouchi Zhang

doi:10.1109/ECTC51906.2022.00046

Implementation of Fully Coupled Electromigration Theory in COMSOL

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

5 Citations (Scopus)

56 Downloads (Pure)

Abstract

In this paper, a 3D and fully coupled electromigration modeling is implemented using COMSOL. The fully coupled multi-physics theory has a unique set of partial differential equations, which cannot be directly simulated with the standard finite element software such as ABAQUS and ANSYS. With the weak form PDE modulus in COMSOL, the weak form of the governing equations is obtained and realized for a 3D finite element modeling of electromigration. The metal lines under totally constrained and stress-free conditions with a perfectly blocking condition are presented as benchmark problems, in which the finite element solutions are in excellent agreement with the analytical solutions.

Original language	English
Title of host publication	Proceedings of the 2022 IEEE 72nd Electronic Components and Technology Conference (ECTC)
Editors	L. O'Conner
Place of Publication	Piscataway
Publisher	IEEE
Pages	233-238
Number of pages	6
ISBN (Electronic)	978-1-6654-7943-1
ISBN (Print)	978-1-6654-7944-8
DOIs	https://doi.org/10.1109/ECTC51906.2022.00046
Publication status	Published - 2022
Event	2022 IEEE 72nd Electronic Components and Technology Conference (ECTC) - San Diego, United States Duration: 31 May 2022 → 3 Jun 2022 Conference number: 72nd

Conference

Conference	2022 IEEE 72nd Electronic Components and Technology Conference (ECTC)
Abbreviated title	ECTC 2022
Country/Territory	United States
City	San Diego
Period	31/05/22 → 3/06/22

Bibliographical note

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

Keywords-electromigration
general coupling theory
multiphysics modeling
finite element analysis

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10.1109/ECTC51906.2022.00046

Implementation_of_Fully_Coupled_Electromigration_Theory_in_COMSOLFinal published version, 1.2 MB

Cite this

@inproceedings{281edd716f3a4662a287404201b6054c,

title = "Implementation of Fully Coupled Electromigration Theory in COMSOL",

abstract = "In this paper, a 3D and fully coupled electromigration modeling is implemented using COMSOL. The fully coupled multi-physics theory has a unique set of partial differential equations, which cannot be directly simulated with the standard finite element software such as ABAQUS and ANSYS. With the weak form PDE modulus in COMSOL, the weak form of the governing equations is obtained and realized for a 3D finite element modeling of electromigration. The metal lines under totally constrained and stress-free conditions with a perfectly blocking condition are presented as benchmark problems, in which the finite element solutions are in excellent agreement with the analytical solutions.",

keywords = "Keywords-electromigration, general coupling theory, multiphysics modeling, finite element analysis",

author = "Zhen Cui and Xuejun Fan and Kouchi Zhang",

note = "Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.; 2022 IEEE 72nd Electronic Components and Technology Conference (ECTC), ECTC 2022 ; Conference date: 31-05-2022 Through 03-06-2022",

year = "2022",

doi = "10.1109/ECTC51906.2022.00046",

language = "English",

isbn = "978-1-6654-7944-8",

pages = "233--238",

editor = "L. O'Conner",

booktitle = "Proceedings of the 2022 IEEE 72nd Electronic Components and Technology Conference (ECTC)",

publisher = "IEEE",

address = "United States",

}

Cui, Z, Fan, X & Zhang, K 2022, Implementation of Fully Coupled Electromigration Theory in COMSOL. in L O'Conner (ed.), Proceedings of the 2022 IEEE 72nd Electronic Components and Technology Conference (ECTC)., 9816390, IEEE, Piscataway, pp. 233-238, 2022 IEEE 72nd Electronic Components and Technology Conference (ECTC), San Diego, California, United States, 31/05/22. https://doi.org/10.1109/ECTC51906.2022.00046

Implementation of Fully Coupled Electromigration Theory in COMSOL. / Cui, Zhen; Fan, Xuejun ; Zhang, Kouchi.
Proceedings of the 2022 IEEE 72nd Electronic Components and Technology Conference (ECTC). ed. / L. O'Conner. Piscataway: IEEE, 2022. p. 233-238 9816390.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Implementation of Fully Coupled Electromigration Theory in COMSOL

AU - Cui, Zhen

AU - Fan, Xuejun

AU - Zhang, Kouchi

N1 - Conference code: 72nd

PY - 2022

Y1 - 2022

N2 - In this paper, a 3D and fully coupled electromigration modeling is implemented using COMSOL. The fully coupled multi-physics theory has a unique set of partial differential equations, which cannot be directly simulated with the standard finite element software such as ABAQUS and ANSYS. With the weak form PDE modulus in COMSOL, the weak form of the governing equations is obtained and realized for a 3D finite element modeling of electromigration. The metal lines under totally constrained and stress-free conditions with a perfectly blocking condition are presented as benchmark problems, in which the finite element solutions are in excellent agreement with the analytical solutions.

AB - In this paper, a 3D and fully coupled electromigration modeling is implemented using COMSOL. The fully coupled multi-physics theory has a unique set of partial differential equations, which cannot be directly simulated with the standard finite element software such as ABAQUS and ANSYS. With the weak form PDE modulus in COMSOL, the weak form of the governing equations is obtained and realized for a 3D finite element modeling of electromigration. The metal lines under totally constrained and stress-free conditions with a perfectly blocking condition are presented as benchmark problems, in which the finite element solutions are in excellent agreement with the analytical solutions.

KW - Keywords-electromigration

KW - general coupling theory

KW - multiphysics modeling

KW - finite element analysis

UR - http://www.scopus.com/inward/record.url?scp=85134699244&partnerID=8YFLogxK

U2 - 10.1109/ECTC51906.2022.00046

DO - 10.1109/ECTC51906.2022.00046

M3 - Conference contribution

SN - 978-1-6654-7944-8

SP - 233

EP - 238

BT - Proceedings of the 2022 IEEE 72nd Electronic Components and Technology Conference (ECTC)

A2 - O'Conner, L.

PB - IEEE

CY - Piscataway

T2 - 2022 IEEE 72nd Electronic Components and Technology Conference (ECTC)

Y2 - 31 May 2022 through 3 June 2022

ER -

Implementation of Fully Coupled Electromigration Theory in COMSOL

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