Improved damper geometry for parallel-plate MEMS

R dias, L Mol, E Cretu, RF Wolffenbuttel, LA Rocha

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationProceedings of MME 2009
Editors s.n.
Place of Publicationtoulouse,france
PublisherMME
Pages1-4
Number of pages4
ISBN (Print)2-907801-08-2
Publication statusPublished - 2009
EventMME 2009 - toulouse,france
Duration: 20 Sep 200922 Sep 2009

Publication series

Name
PublisherMME

Conference

ConferenceMME 2009
Period20/09/0922/09/09

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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