Improved damper geometry for parallel-plate MEMS

R dias, L Mol, E Cretu, RF Wolffenbuttel, LA Rocha

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings of MME 2009
Editors	s.n.
Place of Publication	toulouse,france
Publisher	MME
Pages	1-4
Number of pages	4
ISBN (Print)	2-907801-08-2
Publication status	Published - 2009
Event	MME 2009 - toulouse,france Duration: 20 Sept 2009 → 22 Sept 2009

Name
Publisher	MME

Conference	MME 2009
Period	20/09/09 → 22/09/09

Keywords

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title = "Improved damper geometry for parallel-plate MEMS",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "R dias and L Mol and E Cretu and RF Wolffenbuttel and LA Rocha",

year = "2009",

language = "Undefined/Unknown",

isbn = "2-907801-08-2",

publisher = "MME",

pages = "1--4",

editor = "s.n.",

booktitle = "Proceedings of MME 2009",

note = "MME 2009 ; Conference date: 20-09-2009 Through 22-09-2009",

}

TY - GEN

T1 - Improved damper geometry for parallel-plate MEMS

AU - dias, R

AU - Mol, L

AU - Cretu, E

AU - Wolffenbuttel, RF

AU - Rocha, LA

PY - 2009

Y1 - 2009

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 2-907801-08-2

SP - 1

EP - 4

BT - Proceedings of MME 2009

A2 - s.n., null

PB - MME

CY - toulouse,france

T2 - MME 2009

Y2 - 20 September 2009 through 22 September 2009

ER -