Improving the conductivity of platinum-containing nano-structures created by electron-beam-induced deposition

APJM Botman, M Hesselberth, JJL Mulders

    Research output: Contribution to journalArticleScientificpeer-review

    72 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)1139-1142
    Number of pages4
    JournalMicroelectronic Engineering
    Volume85
    Issue number5-6
    Publication statusPublished - 2008

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