Improving the conductivity of platinum-containing nano-structures created by electron-beam-induced deposition

APJM Botman, M Hesselberth, JJL Mulders

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1139-1142
Number of pages	4
Journal	Microelectronic Engineering
Volume	85
Issue number	5-6
Publication status	Published - 2008

Keywords

@article{a188b22ac7da479ab8cc0b5790c51fbe,

title = "Improving the conductivity of platinum-containing nano-structures created by electron-beam-induced deposition",

keywords = "Geen BTA classificatie",

author = "APJM Botman and M Hesselberth and JJL Mulders",

year = "2008",

language = "Undefined/Unknown",

volume = "85",

pages = "1139--1142",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

number = "5-6",

}