In-situ characterization of precipation in Al-Cu thin films.

JP Lokker, AJ Bottger, GCAM Janssen, S Radelaar

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    Original languageUndefined/Unknown
    Title of host publicationProceedings MRS Symposium Advanced Interconnects and Contacts.
    EditorsD Edelstein, T Kikkawa, MC Öztürk, KN Tu, EJ Weitzman
    Pages471-476
    Number of pages6
    Publication statusPublished - 1999

    Publication series

    Name
    Name
    Volume564

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