Influence of transparent conductive oxides on passivation of a-Si:H/c-Si heterojunctions as studied by atomic layer deposited Al-doped ZnO

B Macco, D Deligiannis, S Smit, RACMM van Swaaij, M Zeman, WMM Kessels

Research output: Contribution to journalArticleScientificpeer-review

34 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-5
Number of pages5
JournalSemiconductor Science and Technology
Issue number12
Publication statusPublished - 2014

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