@inproceedings{ff152ff6fccb4413a131a2be32c18b87,
title = "Infrared thermal imaging of SiNx membranes",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "A Irace and G Breglio and M Spirito and PM Sarro",
year = "2000",
language = "Undefined/Unknown",
isbn = "0-8194-3775-1",
publisher = "International Society for Optical Engineering",
pages = "1--7",
editor = "{BF Andresen} and {GF Fulop} and {M Strojnik}",
booktitle = "Proceedings of SPIE, vol. 4130",
note = "Infrared Technology and Applications XXVI, San Diego ; Conference date: 30-07-2000 Through 03-08-2000",
}