Infrared thermal imaging of SiNx membranes

A Irace, G Breglio, M Spirito, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationProceedings of SPIE, vol. 4130
Editors BF Andresen, GF Fulop, M Strojnik
Place of PublicationBellingham
PublisherInternational Society for Optical Engineering
Pages1-7
Number of pages7
ISBN (Print)0-8194-3775-1
Publication statusPublished - 2000
EventInfrared Technology and Applications XXVI, San Diego - Bellingham
Duration: 30 Jul 20003 Aug 2000

Publication series

Name
PublisherInternational Society for Optical Engineering

Conference

ConferenceInfrared Technology and Applications XXVI, San Diego
Period30/07/003/08/00

Keywords

  • ZX Int.klas.verslagjaar < 2002

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