Insights into the effect of susceptor rotational speed in CVD reactor on the quality of 4H-SiC epitaxial layer on homogeneous substrates

Zhuorui Tang, Lin Gu, Lei Jin, Kefeng Dai, Chaobin Mao, Sanzhong Wu, Rongwei Zhang, Jinsong Yang, Guoqi Zhang, More Authors

Research output: Contribution to journal › Article › Scientific › peer-review

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Material Science