Insights to emitter saturation current densities of boron implanted samples based on defects simulations

KRC Mok, RCG Naber, LK Nanver

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

6 Citations (Scopus)
Original languageEnglish
Title of host publicationAIP Conf. Proc. Vol. 1496, 19th International Conference on Ion Implantation Technology (IIT 2012)
Pages245-248
Number of pages4
DOIs
Publication statusPublished - 2012

Publication series

Name
NameAIP Conference Proceedings
Volume1496
ISSN (Print)0094-243X

Keywords

  • Conf.proc. > 3 pag

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