Original language | English |
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Title of host publication | AIP Conf. Proc. Vol. 1496, 19th International Conference on Ion Implantation Technology (IIT 2012) |
Pages | 245-248 |
Number of pages | 4 |
DOIs | |
Publication status | Published - 2012 |
Publication series
Name |
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Name | AIP Conference Proceedings |
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Volume | 1496 |
ISSN (Print) | 0094-243X |
Keywords
- Conf.proc. > 3 pag