Interface roughness in Mo/Si multilayers

I Nedelcu, RWE van de Kruijs, AE Yakshin, FD Tichelaar, E Zoethout, E Louis, H Enkisch, S Muellender, F Bijkerk

    Research output: Contribution to journalArticleScientificpeer-review

    23 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)434-438
    Number of pages5
    JournalThin Solid Films
    Volume515
    Publication statusPublished - 2006

    Keywords

    • CWTS 0.75 <= JFIS < 2.00

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