Abstract
Silicon carbide (SiC) coated vertically aligned carbon nanotubes (VACNT) are attractive material for fabricating MEMS devices as an alternative for bulk micromachining of SiC. In order to examine the mechanical properties of SiC-CNT composites at high temperatures, we fabricated VACNT micro-pillars with different amounts of SiC coating and performed high-temperature micro-pillar compression on these samples. The indentation result shows that the coating can improve the elastic modulus up to three orders of magnitude. Samples were tested at room temperature, 300°C, 600°C, and 900°C under compressive load. No significant degradation of the mechanical properties was observed at elevated temperatures, demonstrating the harsh environment potential of this composite.
Original language | English |
---|---|
Title of host publication | Proceedings of the 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) |
Place of Publication | Danvers |
Publisher | IEEE |
Pages | 626-629 |
Number of pages | 4 |
ISBN (Electronic) | 979-8-3503-5792-9 |
ISBN (Print) | 979-8-3503-5792-9 |
DOIs | |
Publication status | Published - 2024 |
Event | 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) - Austin, United States Duration: 21 Jan 2024 → 25 Jan 2024 Conference number: 37th |
Conference
Conference | 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) |
---|---|
Country/Territory | United States |
City | Austin |
Period | 21/01/24 → 25/01/24 |
Bibliographical note
Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-careOtherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.
Keywords
- SiC-CNT composite
- high-temperature
- micro-pillar
- compression test