Investigating Mechanical Properties of Silicon Carbide Coated Carbon Nanotube Composite at Elevated Temperatures

Jiarui Mo; Gerald J.K.  Schaffar; Leiming Du; Verena  Maier-Kiener; Daniel  Kiener; Sten Vollebregt; Guoqi Zhang

doi:10.1109/MEMS58180.2024.10439455

Investigating Mechanical Properties of Silicon Carbide Coated Carbon Nanotube Composite at Elevated Temperatures

Jiarui Mo, Gerald J.K. Schaffar, Leiming Du, Verena Maier-Kiener, Daniel Kiener, Sten Vollebregt, Guoqi Zhang

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Abstract

Silicon carbide (SiC) coated vertically aligned carbon nanotubes (VACNT) are attractive material for fabricating MEMS devices as an alternative for bulk micromachining of SiC. In order to examine the mechanical properties of SiC-CNT composites at high temperatures, we fabricated VACNT micro-pillars with different amounts of SiC coating and performed high-temperature micro-pillar compression on these samples. The indentation result shows that the coating can improve the elastic modulus up to three orders of magnitude. Samples were tested at room temperature, 300°C, 600°C, and 900°C under compressive load. No significant degradation of the mechanical properties was observed at elevated temperatures, demonstrating the harsh environment potential of this composite.

Original language	English
Title of host publication	Proceedings of the 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
Place of Publication	Danvers
Publisher	IEEE
Pages	626-629
Number of pages	4
ISBN (Electronic)	979-8-3503-5792-9
ISBN (Print)	979-8-3503-5792-9
DOIs	https://doi.org/10.1109/MEMS58180.2024.10439455
Publication status	Published - 2024
Event	2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) - Austin, United States Duration: 21 Jan 2024 → 25 Jan 2024 Conference number: 37th

Conference

Conference	2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)
Country/Territory	United States
City	Austin
Period	21/01/24 → 25/01/24

Bibliographical note

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

SiC-CNT composite
high-temperature
micro-pillar
compression test

Access to Document

10.1109/MEMS58180.2024.10439455

Cite this

Mo, J., Schaffar, G. J. K., Du, L., Maier-Kiener, V., Kiener, D., Vollebregt, S., & Zhang, G. (2024). Investigating Mechanical Properties of Silicon Carbide Coated Carbon Nanotube Composite at Elevated Temperatures. In Proceedings of the 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 626-629). IEEE. https://doi.org/10.1109/MEMS58180.2024.10439455

@inproceedings{57847760f4084c02a96ba5aa43b81648,

title = "Investigating Mechanical Properties of Silicon Carbide Coated Carbon Nanotube Composite at Elevated Temperatures",

abstract = "Silicon carbide (SiC) coated vertically aligned carbon nanotubes (VACNT) are attractive material for fabricating MEMS devices as an alternative for bulk micromachining of SiC. In order to examine the mechanical properties of SiC-CNT composites at high temperatures, we fabricated VACNT micro-pillars with different amounts of SiC coating and performed high-temperature micro-pillar compression on these samples. The indentation result shows that the coating can improve the elastic modulus up to three orders of magnitude. Samples were tested at room temperature, 300°C, 600°C, and 900°C under compressive load. No significant degradation of the mechanical properties was observed at elevated temperatures, demonstrating the harsh environment potential of this composite.",

keywords = "SiC-CNT composite, high-temperature, micro-pillar, compression test",

author = "Jiarui Mo and Schaffar, {Gerald J.K.} and Leiming Du and Verena Maier-Kiener and Daniel Kiener and Sten Vollebregt and Guoqi Zhang",

note = "Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.; 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) ; Conference date: 21-01-2024 Through 25-01-2024",

year = "2024",

doi = "10.1109/MEMS58180.2024.10439455",

language = "English",

isbn = "979-8-3503-5792-9",

pages = "626--629",

booktitle = "Proceedings of the 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "IEEE",

address = "United States",

}

Mo, J, Schaffar, GJK, Du, L, Maier-Kiener, V, Kiener, D, Vollebregt, S & Zhang, G 2024, Investigating Mechanical Properties of Silicon Carbide Coated Carbon Nanotube Composite at Elevated Temperatures. in Proceedings of the 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, Danvers, pp. 626-629, 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS), Austin, United States, 21/01/24. https://doi.org/10.1109/MEMS58180.2024.10439455

Investigating Mechanical Properties of Silicon Carbide Coated Carbon Nanotube Composite at Elevated Temperatures. / Mo, Jiarui; Schaffar, Gerald J.K. ; Du, Leiming et al.
Proceedings of the 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS). Danvers: IEEE, 2024. p. 626-629.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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T1 - Investigating Mechanical Properties of Silicon Carbide Coated Carbon Nanotube Composite at Elevated Temperatures

AU - Mo, Jiarui

AU - Schaffar, Gerald J.K.

AU - Du, Leiming

AU - Maier-Kiener, Verena

AU - Kiener, Daniel

AU - Vollebregt, Sten

AU - Zhang, Guoqi

N1 - Conference code: 37th

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Y1 - 2024

N2 - Silicon carbide (SiC) coated vertically aligned carbon nanotubes (VACNT) are attractive material for fabricating MEMS devices as an alternative for bulk micromachining of SiC. In order to examine the mechanical properties of SiC-CNT composites at high temperatures, we fabricated VACNT micro-pillars with different amounts of SiC coating and performed high-temperature micro-pillar compression on these samples. The indentation result shows that the coating can improve the elastic modulus up to three orders of magnitude. Samples were tested at room temperature, 300°C, 600°C, and 900°C under compressive load. No significant degradation of the mechanical properties was observed at elevated temperatures, demonstrating the harsh environment potential of this composite.

AB - Silicon carbide (SiC) coated vertically aligned carbon nanotubes (VACNT) are attractive material for fabricating MEMS devices as an alternative for bulk micromachining of SiC. In order to examine the mechanical properties of SiC-CNT composites at high temperatures, we fabricated VACNT micro-pillars with different amounts of SiC coating and performed high-temperature micro-pillar compression on these samples. The indentation result shows that the coating can improve the elastic modulus up to three orders of magnitude. Samples were tested at room temperature, 300°C, 600°C, and 900°C under compressive load. No significant degradation of the mechanical properties was observed at elevated temperatures, demonstrating the harsh environment potential of this composite.

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KW - compression test

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BT - Proceedings of the 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)

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T2 - 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)

Y2 - 21 January 2024 through 25 January 2024

ER -

Investigating Mechanical Properties of Silicon Carbide Coated Carbon Nanotube Composite at Elevated Temperatures

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Keywords

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