Investigation of the influence of measurement frequency on the response of humidity sensors based on porous si, porous polysilicon and porous sic

E Connolly, GMO O Halloran, HMT Pham, PM Sarro, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationSAFE - ProRISC - SeSens 2001, proceedings. Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductors Sensor and Actuator Technology
Place of PublicationUtrecht
PublisherSTW Technology Foundation
Number of pages4
ISBN (Print)90-73461-29-4
Publication statusPublished - 2001

Publication series

PublisherSTW technology foundation


  • ZX Int.klas.verslagjaar < 2002

Cite this