Investigation of the influence of measurement frequency on the response of humidity sensors based on porous si, porous polysilicon and porous sic

E Connolly; GMO O Halloran; HMT Pham; PM Sarro; PJ French

Investigation of the influence of measurement frequency on the response of humidity sensors based on porous si, porous polysilicon and porous sic

E Connolly, GMO O Halloran, HMT Pham, PM Sarro, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	SAFE - ProRISC - SeSens 2001, proceedings. Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductors Sensor and Actuator Technology
Place of Publication	Utrecht
Publisher	STW Technology Foundation
Pages	773-776
Number of pages	4
ISBN (Print)	90-73461-29-4
Publication status	Published - 2001

Publication series

Name
Publisher	STW technology foundation

Keywords

ZX Int.klas.verslagjaar < 2002

Cite this

Connolly, E., O Halloran, GMO., Pham, HMT., Sarro, PM., & French, PJ. (2001). Investigation of the influence of measurement frequency on the response of humidity sensors based on porous si, porous polysilicon and porous sic. In SAFE - ProRISC - SeSens 2001, proceedings. Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductors Sensor and Actuator Technology (pp. 773-776). STW Technology Foundation.

Connolly, E ; O Halloran, GMO ; Pham, HMT et al. / Investigation of the influence of measurement frequency on the response of humidity sensors based on porous si, porous polysilicon and porous sic. SAFE - ProRISC - SeSens 2001, proceedings. Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductors Sensor and Actuator Technology. Utrecht : STW Technology Foundation, 2001. pp. 773-776

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title = "Investigation of the influence of measurement frequency on the response of humidity sensors based on porous si, porous polysilicon and porous sic",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "E Connolly and {O Halloran}, GMO and HMT Pham and PM Sarro and PJ French",

year = "2001",

language = "Undefined/Unknown",

isbn = "90-73461-29-4",

publisher = "STW Technology Foundation",

pages = "773--776",

booktitle = "SAFE - ProRISC - SeSens 2001, proceedings. Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductors Sensor and Actuator Technology",

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Connolly, E, O Halloran, GMO, Pham, HMT, Sarro, PM & French, PJ 2001, Investigation of the influence of measurement frequency on the response of humidity sensors based on porous si, porous polysilicon and porous sic. in SAFE - ProRISC - SeSens 2001, proceedings. Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductors Sensor and Actuator Technology. STW Technology Foundation, Utrecht, pp. 773-776.

Investigation of the influence of measurement frequency on the response of humidity sensors based on porous si, porous polysilicon and porous sic. / Connolly, E; O Halloran, GMO; Pham, HMT et al.
SAFE - ProRISC - SeSens 2001, proceedings. Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductors Sensor and Actuator Technology. Utrecht: STW Technology Foundation, 2001. p. 773-776.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Investigation of the influence of measurement frequency on the response of humidity sensors based on porous si, porous polysilicon and porous sic

AU - Connolly, E

AU - O Halloran, GMO

AU - Pham, HMT

AU - Sarro, PM

AU - French, PJ

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 90-73461-29-4

SP - 773

EP - 776

BT - SAFE - ProRISC - SeSens 2001, proceedings. Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductors Sensor and Actuator Technology

PB - STW Technology Foundation

CY - Utrecht

ER -

Connolly E, O Halloran GMO, Pham HMT, Sarro PM , French PJ. Investigation of the influence of measurement frequency on the response of humidity sensors based on porous si, porous polysilicon and porous sic. In SAFE - ProRISC - SeSens 2001, proceedings. Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductors Sensor and Actuator Technology. Utrecht: STW Technology Foundation. 2001. p. 773-776