Lithographic apparatus and device manufacturing method

Huibert Visser (Inventor), David W. Callan (Inventor), RH Munnig Schmidt (Inventor), RB Wiener (Inventor), JTGM Ven (Inventor), GH Robbins (Inventor)

Research output: Patent

ASML NEO

Keywords

@misc{17d82ad795af4c7382332956d4bc433c,

title = "Lithographic apparatus and device manufacturing method",

keywords = "Octrooi",

author = "Huibert Visser and Callan, {David W.} and {Munnig Schmidt}, RH and RB Wiener and JTGM Ven and GH Robbins",

note = "ASML NEO; US 2007/0162781 A1; ASML NEO",

year = "2007",

language = "Undefined/Unknown",

type = "Patent",

}