Low loss single-crystal silicon mechanical resonators for the investigation of thermal noise statistical properties

E Serre; M Bonaldi; A Borrielli; L Conti; G Pandraud; PM Sarro

doi:10.1016/j.sna.2015.03.037

Low loss single-crystal silicon mechanical resonators for the investigation of thermal noise statistical properties

E Serre, M Bonaldi, A Borrielli, L Conti, G Pandraud, PM Sarro

Electronic Components, Technology and Materials

Research output: Contribution to journal › Article › Scientific › peer-review

2 Citations (Scopus)

Original language	English
Pages (from-to)	48-54
Number of pages	7
Journal	Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume	227
Issue number	May
DOIs	https://doi.org/10.1016/j.sna.2015.03.037
Publication status	Published - 2015

Bibliographical note

Harvest
Available online 4-4-2015

Access to Document

10.1016/j.sna.2015.03.037

Cite this

Serre, E., Bonaldi, M., Borrielli, A., Conti, L., Pandraud, G., & Sarro, PM. (2015). Low loss single-crystal silicon mechanical resonators for the investigation of thermal noise statistical properties. Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers, 227(May), 48-54. https://doi.org/10.1016/j.sna.2015.03.037

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title = "Low loss single-crystal silicon mechanical resonators for the investigation of thermal noise statistical properties",

author = "E Serre and M Bonaldi and A Borrielli and L Conti and G Pandraud and PM Sarro",

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Serre, E, Bonaldi, M, Borrielli, A, Conti, L, Pandraud, G & Sarro, PM 2015, 'Low loss single-crystal silicon mechanical resonators for the investigation of thermal noise statistical properties', Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers, vol. 227, no. May, pp. 48-54. https://doi.org/10.1016/j.sna.2015.03.037

Low loss single-crystal silicon mechanical resonators for the investigation of thermal noise statistical properties. / Serre, E; Bonaldi, M; Borrielli, A et al.
In: Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers, Vol. 227, No. May, 2015, p. 48-54.

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Low loss single-crystal silicon mechanical resonators for the investigation of thermal noise statistical properties

AU - Serre, E

AU - Bonaldi, M

AU - Borrielli, A

AU - Conti, L

AU - Pandraud, G

AU - Sarro, PM

N1 - Harvest Available online 4-4-2015

PY - 2015

Y1 - 2015

U2 - 10.1016/j.sna.2015.03.037

DO - 10.1016/j.sna.2015.03.037

M3 - Article

SN - 0924-4247

VL - 227

SP - 48

EP - 54

JO - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers

JF - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers

IS - May

ER -