Low loss single-crystal silicon mechanical resonators for the investigation of thermal noise statistical properties

E Serre, M Bonaldi, A Borrielli, L Conti, G Pandraud, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

2 Citations (Scopus)
Original languageEnglish
Pages (from-to)48-54
Number of pages7
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume227
Issue numberMay
DOIs
Publication statusPublished - 2015

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