Low power PECVD SIC delay lines for optical coherence tomography in the visible

G Pandraud, L Mele, B Morana, E Margallo-Balbás, PJ French, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)
Original languageEnglish
Title of host publicationTechnical Digest of the 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011)
EditorsL-S Fan et al
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Society
Pages1554-1557
Number of pages4
ISBN (Print)978-1-4577-0156-6
DOIs
Publication statusPublished - 2011
EventTransducers 2011 - Beijing, China
Duration: 5 Jun 20119 Jun 2011

Publication series

Name
PublisherIEEE

Conference

ConferenceTransducers 2011
Period5/06/119/06/11

Keywords

  • Elektrotechniek
  • Techniek
  • conference contrib. refereed
  • Conf.proc. > 3 pag

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