Low-pressure chemical vapor deposition of pureB layers on silicon for p+n junction formation

KRC Mok, V Mohammadi, LK Nanver, WB De Boer, AHG Vlooswijk

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)
Original languageEnglish
Title of host publication12th International Workshop on Junction Technology (IWJT 2012), Shanghai, China
Pages113-116
Number of pages4
DOIs
Publication statusPublished - 2012

Keywords

  • Conf.proc. > 3 pag

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