Low‐Temperature PureB CVD Technology for CMOS Compatible Photodetectors

Vahid Mohammadi; Stoyan Nihtianov

doi:10.5772/63344

Low‐Temperature PureB CVD Technology for CMOS Compatible Photodetectors

Vahid Mohammadi, Stoyan Nihtianov

Electronic Instrumentation

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Abstract

In this chapter, a new technology for low‐temperature (LT, 400°C) boron deposition is developed, which provides a smooth, uniform, closed LT boron layer. This technology is successfully employed to create near‐ideal LT PureB (pure boron) diodes with low, deep junction‐like saturation currents, allowing full integration of LT PureB photodiodes with electronic interface circuits and other sensors on a single chip. In this way, smart‐sensor systems or even charge‐coupled device (CCD) or complementary metal oxide semiconductor (CMOS) ultraviolet (UV) imagers can be realised.

Original language	English
Title of host publication	Chemical Vapor Deposition
Subtitle of host publication	Recent Advances and Applications in Optical, Solar Cells and Solid State Devices
Editors	Sudheer Neralla
Publisher	Intech
Pages	137-157
Number of pages	21
ISBN (Electronic)	978-953-51-2573-0
ISBN (Print)	978-953-51-2572-3
DOIs	https://doi.org/10.5772/63344
Publication status	Published - 2016

Keywords

low‐temperature boron deposition
ultrashallow p+n junction photodiode
chemical vapour deposition
UV photodetector
CMOS imager
OA-Fund TU Delft

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10.5772/63344

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abstract = "In this chapter, a new technology for low‐temperature (LT, 400°C) boron deposition is developed, which provides a smooth, uniform, closed LT boron layer. This technology is successfully employed to create near‐ideal LT PureB (pure boron) diodes with low, deep junction‐like saturation currents, allowing full integration of LT PureB photodiodes with electronic interface circuits and other sensors on a single chip. In this way, smart‐sensor systems or even charge‐coupled device (CCD) or complementary metal oxide semiconductor (CMOS) ultraviolet (UV) imagers can be realised.",

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BT - Chemical Vapor Deposition

A2 - Neralla, Sudheer

PB - Intech

ER -

Low‐Temperature PureB CVD Technology for CMOS Compatible Photodetectors

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