Mechanical and structural properties of aluminium alloy thin films for microelectronic applications

JP Lokker

    Research output: ThesisDissertation (TU Delft)

    Original languageUndefined/Unknown
    QualificationDoctor of Philosophy
    Awarding Institution
    • Delft University of Technology
    Supervisors/Advisors
    • Radelaar, S, Supervisor
    • Janssen, G.C.A.M., Advisor
    Award date5 Jun 2002
    Place of PublicationDelft
    Publisher
    Publication statusPublished - 2002

    Keywords

    • Diss. prom. aan TU Delft

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