Mechanical and structural properties of aluminium alloy thin films for microelectronic applications

JP Lokker

Research output: Thesis › Dissertation (TU Delft)

Original language	Undefined/Unknown
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Radelaar, S, Supervisor Janssen, Guido, Advisor
Award date	5 Jun 2002
Place of Publication	Delft
Publisher	Ponsen en Looijen, Wageningen
Publication status	Published - 2002

Keywords

@phdthesis{2cdb1d66474e4995ba2439711d3c1699,

title = "Mechanical and structural properties of aluminium alloy thin films for microelectronic applications",

keywords = "Diss. prom. aan TU Delft",

author = "JP Lokker",

year = "2002",

language = "Undefined/Unknown",

publisher = "Ponsen en Looijen, Wageningen",

type = "Dissertation (TU Delft)",

school = "Delft University of Technology",

}