Mechanical integrity failure of bulk-micromachined Si wafers: influence of structure geometry and wafer handling

M Bartek

Mechanical integrity failure of bulk-micromachined Si wafers: influence of structure geometry and wafer handling

M Bartek

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	ASDAM 2000 conference proceedings
Editors	J Osvald, T Watanabe
Place of Publication	Piscataway
Publisher	IEEE Society
Pages	227-230
Number of pages	4
ISBN (Print)	0-7803-5939-9
Publication status	Published - 2000
Event	3rd International EuroConference on Advanced Semiconductor Devices and Microsystems, Smolenice, Slovakia - Piscataway Duration: 16 Oct 2000 → 18 Oct 2000

Publication series

Name
Publisher	IEEE

Conference

Conference	3rd International EuroConference on Advanced Semiconductor Devices and Microsystems, Smolenice, Slovakia
Period	16/10/00 → 18/10/00

Keywords

ZX Int.klas.verslagjaar < 2002

Cite this

@inproceedings{3d2fe1c62cba45479312817f0aed4963,

title = "Mechanical integrity failure of bulk-micromachined Si wafers: influence of structure geometry and wafer handling",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "M Bartek",

year = "2000",

language = "Undefined/Unknown",

isbn = "0-7803-5939-9",

publisher = "IEEE Society",

pages = "227--230",

editor = "{J Osvald} and {T Watanabe}",

booktitle = "ASDAM 2000 conference proceedings",

note = "3rd International EuroConference on Advanced Semiconductor Devices and Microsystems, Smolenice, Slovakia ; Conference date: 16-10-2000 Through 18-10-2000",

}

TY - GEN

T1 - Mechanical integrity failure of bulk-micromachined Si wafers: influence of structure geometry and wafer handling

AU - Bartek, M

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 0-7803-5939-9

SP - 227

EP - 230

BT - ASDAM 2000 conference proceedings

A2 - J Osvald, null

A2 - T Watanabe, null

PB - IEEE Society

CY - Piscataway

T2 - 3rd International EuroConference on Advanced Semiconductor Devices and Microsystems, Smolenice, Slovakia

Y2 - 16 October 2000 through 18 October 2000

ER -