Mechanical model and characterization of thin-film encapsulation for MEMS

VG Huerta; F Santagata; L Mele; MR Poot; JF Creemer; PM Sarro

Mechanical model and characterization of thin-film encapsulation for MEMS

VG Huerta, F Santagata, L Mele, MR Poot, JF Creemer, PM Sarro

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	Proceedings of the 13th SAFE Workshop of the STW.ICT Conference 2010
Editors	P French et al
Place of Publication	Utrecht, The Netherlands
Publisher	STW
Pages	85-88
Number of pages	4
ISBN (Print)	978-90-73461-67-3
Publication status	Published - 2010
Event	13th SAFE Workshop of the STW.ICT Conference 2010, Veldhoven, The Netherlands - Utrecht, The Netherlands Duration: 18 Nov 2010 → 19 Nov 2010

Publication series

Name
Publisher	STW

Conference

Conference	13th SAFE Workshop of the STW.ICT Conference 2010, Veldhoven, The Netherlands
Period	18/11/10 → 19/11/10

Keywords

Vakpubl., Overig wet. > 3 pag

Cite this

@inproceedings{d2a9f4d6b8424121834c2b6d6730c4bc,

title = "Mechanical model and characterization of thin-film encapsulation for MEMS",

keywords = "Vakpubl., Overig wet. > 3 pag",

author = "VG Huerta and F Santagata and L Mele and MR Poot and JF Creemer and PM Sarro",

year = "2010",

language = "English",

isbn = "978-90-73461-67-3",

publisher = "STW",

pages = "85--88",

editor = "{French et al}, P",

booktitle = "Proceedings of the 13th SAFE Workshop of the STW.ICT Conference 2010",

note = "13th SAFE Workshop of the STW.ICT Conference 2010, Veldhoven, The Netherlands ; Conference date: 18-11-2010 Through 19-11-2010",

}

Huerta, VG, Santagata, F, Mele, L, Poot, MR, Creemer, JF & Sarro, PM 2010, Mechanical model and characterization of thin-film encapsulation for MEMS. in P French et al (ed.), Proceedings of the 13th SAFE Workshop of the STW.ICT Conference 2010. STW, Utrecht, The Netherlands, pp. 85-88, 13th SAFE Workshop of the STW.ICT Conference 2010, Veldhoven, The Netherlands, 18/11/10.

Mechanical model and characterization of thin-film encapsulation for MEMS. / Huerta, VG; Santagata, F; Mele, L et al.
Proceedings of the 13th SAFE Workshop of the STW.ICT Conference 2010. ed. / P French et al. Utrecht, The Netherlands: STW, 2010. p. 85-88.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Mechanical model and characterization of thin-film encapsulation for MEMS

AU - Huerta, VG

AU - Santagata, F

AU - Mele, L

AU - Poot, MR

AU - Creemer, JF

AU - Sarro, PM

PY - 2010

Y1 - 2010

KW - Vakpubl., Overig wet. > 3 pag

M3 - Conference contribution

SN - 978-90-73461-67-3

SP - 85

EP - 88

BT - Proceedings of the 13th SAFE Workshop of the STW.ICT Conference 2010

A2 - French et al, P

PB - STW

CY - Utrecht, The Netherlands

T2 - 13th SAFE Workshop of the STW.ICT Conference 2010, Veldhoven, The Netherlands

Y2 - 18 November 2010 through 19 November 2010

ER -