MEMS reliability: a failure mechanisms perspective

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationProceedings 22nd Micromechanics and Microsystems Europe Workshop 2011
EditorsA Johanessen, P Ohlckers, E Johanessen, M Azadmehr
Place of PublicationToensberg, Norway
PublisherVestfold University College
Pages20-29
Number of pages10
ISBN (Print)978-82-7860-224-9
Publication statusPublished - 2011
EventMME 2011: 22nd Micromechanics and Microsystems Technology Europe Workshop - Toensberg, Norway
Duration: 19 Jun 201122 Jun 2011

Publication series

Name
PublisherVestfold University College

Workshop

WorkshopMME 2011
Period19/06/1122/06/11

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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