MEMS reliability: a failure mechanisms perspective

WM van Spengen

MEMS reliability: a failure mechanisms perspective

WM van Spengen

Micro and Nano Engineering

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	Proceedings 22nd Micromechanics and Microsystems Europe Workshop 2011
Editors	A Johanessen, P Ohlckers, E Johanessen, M Azadmehr
Place of Publication	Toensberg, Norway
Publisher	Vestfold University College
Pages	20-29
Number of pages	10
ISBN (Print)	978-82-7860-224-9
Publication status	Published - 2011
Event	MME 2011: 22nd Micromechanics and Microsystems Technology Europe Workshop - Toensberg, Norway Duration: 19 Jun 2011 → 22 Jun 2011

Publication series

Name
Publisher	Vestfold University College

Workshop

Workshop	MME 2011
Period	19/06/11 → 22/06/11

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Cite this

@inproceedings{87ba67abefe446be845daca5b621c14c,

title = "MEMS reliability: a failure mechanisms perspective",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "{van Spengen}, WM",

year = "2011",

language = "English",

isbn = "978-82-7860-224-9",

publisher = "Vestfold University College",

pages = "20--29",

editor = "A Johanessen and P Ohlckers and E Johanessen and M Azadmehr",

booktitle = "Proceedings 22nd Micromechanics and Microsystems Europe Workshop 2011",

note = "MME 2011 : 22nd Micromechanics and Microsystems Technology Europe Workshop ; Conference date: 19-06-2011 Through 22-06-2011",

}

MEMS reliability: a failure mechanisms perspective. / van Spengen, WM.
Proceedings 22nd Micromechanics and Microsystems Europe Workshop 2011. ed. / A Johanessen; P Ohlckers; E Johanessen; M Azadmehr. Toensberg, Norway: Vestfold University College, 2011. p. 20-29.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - MEMS reliability: a failure mechanisms perspective

AU - van Spengen, WM

PY - 2011

Y1 - 2011

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-82-7860-224-9

SP - 20

EP - 29

BT - Proceedings 22nd Micromechanics and Microsystems Europe Workshop 2011

A2 - Johanessen, A

A2 - Ohlckers, P

A2 - Johanessen, E

A2 - Azadmehr, M

PB - Vestfold University College

CY - Toensberg, Norway

T2 - MME 2011

Y2 - 19 June 2011 through 22 June 2011

ER -