MEMS silicon-based micro-evaporator

M Mihailovic, CM Rops, J Hao, L Mele, JF Creemer, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

9 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-9
Number of pages9
JournalJournal of Micromechanics and Microengineering
Volume21
Issue number7
DOIs
Publication statusPublished - 2011

Keywords

  • Elektrotechniek
  • Techniek
  • academic journal papers
  • CWTS 0.75 <= JFIS < 2.00

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