MEMS silicon-based micro-evaporator

M Mihailovic; CM Rops; J Hao; L Mele; JF Creemer; PM Sarro

doi:10.1088/0960-1317/21/7/075007

MEMS silicon-based micro-evaporator

M Mihailovic, CM Rops, J Hao, L Mele, JF Creemer, PM Sarro

Electronic Components, Technology and Materials

Research output: Contribution to journal › Article › Scientific › peer-review

11 Citations (Scopus)

Original language	English
Pages (from-to)	1-9
Number of pages	9
Journal	Journal of Micromechanics and Microengineering
Volume	21
Issue number	7
DOIs	https://doi.org/10.1088/0960-1317/21/7/075007
Publication status	Published - 2011

Keywords

Elektrotechniek
Techniek
academic journal papers
CWTS 0.75 <= JFIS < 2.00

Access to Document

10.1088/0960-1317/21/7/075007

Cite this

@article{ccc54553da1f451b91469f0e00264fa3,

title = "MEMS silicon-based micro-evaporator",

keywords = "Elektrotechniek, Techniek, academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "M Mihailovic and CM Rops and J Hao and L Mele and JF Creemer and PM Sarro",

year = "2011",

doi = "10.1088/0960-1317/21/7/075007",

language = "English",

volume = "21",

pages = "1--9",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

number = "7",

}

TY - JOUR

T1 - MEMS silicon-based micro-evaporator

AU - Mihailovic, M

AU - Rops, CM

AU - Hao, J

AU - Mele, L

AU - Creemer, JF

AU - Sarro, PM

PY - 2011

Y1 - 2011

KW - Elektrotechniek

KW - Techniek

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

U2 - 10.1088/0960-1317/21/7/075007

DO - 10.1088/0960-1317/21/7/075007

M3 - Article

SN - 0960-1317

VL - 21

SP - 1

EP - 9

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 7

ER -