Metal/silicon Schottky barrier lowering by RTCVD interface passivation

Q Ren, WD van Noort, LK Nanver, JW Slotboom

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationProceedings volume 2000-9
Editors F Roozeboom
Place of PublicationPennington, NJ
PublisherThe Electrochemical Society
Number of pages6
ISBN (Print)1-56677-274-5
Publication statusPublished - 2000

Publication series

Publisherthe Electrochemical Society


  • ZX Int.klas.verslagjaar < 2002

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