| Original language | Undefined/Unknown |
|---|---|
| Patent number | US9029767 |
| IPC | Aangevraagd door FEI Company |
| Priority date | 12/05/15 |
| Publication status | Published - 2015 |
Method for adjusting a stem equipped with an aberration corrector
M Bischoff (Inventor), B Rieger (Inventor)
Research output: Patent