JL Herder (Inventor), N Tolou (Inventor)
Research output: Patent
}
TY - PAT
T1 - Micro-electromechanical system
AU - Herder, JL
AU - Tolou, N
PY - 2011
Y1 - 2011
KW - Octrooi
M3 - Patent
M1 - NL 48.337-VB
ER -