Microfabrication and characterization of single-mask silicon microlens arrays for the IR spectra

PNA Belmonte; DW de Lima Monteiro; RF de Oliveira Costa; PJ French; G Pandraud

doi:10.1117/12.2052527

Microfabrication and characterization of single-mask silicon microlens arrays for the IR spectra

PNA Belmonte, DW de Lima Monteiro, RF de Oliveira Costa, PJ French, G Pandraud

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

2 Citations (Scopus)

Original language	English
Title of host publication	Micro-Optics 2014
Editors	H Thienpont, J Mohr, H Zappe, H Nakajima
Place of Publication	Bellingham, WA, USA
Publisher	SPIE
Pages	1-7
Number of pages	7
ISBN (Print)	9781628410785
DOIs	https://doi.org/10.1117/12.2052527
Publication status	Published - 2014
Event	Micro-Optics 2014, Brussels, Belgium - Bellingham, WA, USA Duration: 14 Apr 2014 → 16 Apr 2014

Publication series

Name
Publisher	SPIE

Name	Proceedings of SPIE- International Society for Optical Engineering
Volume	9130
ISSN (Print)	0277-786X

Conference

Conference	Micro-Optics 2014, Brussels, Belgium
Period	14/04/14 → 16/04/14

Bibliographical note

Harvest

Access to Document

10.1117/12.2052527

Cite this

Belmonte, PNA., de Lima Monteiro, DW., de Oliveira Costa, RF., French, PJ., & Pandraud, G. (2014). Microfabrication and characterization of single-mask silicon microlens arrays for the IR spectra. In H. Thienpont, J. Mohr, H. Zappe, & H. Nakajima (Eds.), Micro-Optics 2014 (pp. 1-7). (Proceedings of SPIE- International Society for Optical Engineering; Vol. 9130). SPIE. https://doi.org/10.1117/12.2052527

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title = "Microfabrication and characterization of single-mask silicon microlens arrays for the IR spectra",

author = "PNA Belmonte and {de Lima Monteiro}, DW and {de Oliveira Costa}, RF and PJ French and G Pandraud",

note = "Harvest; Micro-Optics 2014, Brussels, Belgium ; Conference date: 14-04-2014 Through 16-04-2014",

year = "2014",

doi = "10.1117/12.2052527",

language = "English",

isbn = "9781628410785",

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pages = "1--7",

editor = "H Thienpont and J Mohr and H Zappe and H Nakajima",

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Belmonte, PNA, de Lima Monteiro, DW, de Oliveira Costa, RF, French, PJ & Pandraud, G 2014, Microfabrication and characterization of single-mask silicon microlens arrays for the IR spectra. in H Thienpont, J Mohr, H Zappe & H Nakajima (eds), Micro-Optics 2014. Proceedings of SPIE- International Society for Optical Engineering, vol. 9130, SPIE, Bellingham, WA, USA, pp. 1-7, Micro-Optics 2014, Brussels, Belgium, 14/04/14. https://doi.org/10.1117/12.2052527

Microfabrication and characterization of single-mask silicon microlens arrays for the IR spectra. / Belmonte, PNA; de Lima Monteiro, DW; de Oliveira Costa, RF et al.
Micro-Optics 2014. ed. / H Thienpont; J Mohr; H Zappe; H Nakajima. Bellingham, WA, USA: SPIE, 2014. p. 1-7 (Proceedings of SPIE- International Society for Optical Engineering; Vol. 9130).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Microfabrication and characterization of single-mask silicon microlens arrays for the IR spectra

AU - Belmonte, PNA

AU - de Lima Monteiro, DW

AU - de Oliveira Costa, RF

AU - French, PJ

AU - Pandraud, G

N1 - Harvest

PY - 2014

Y1 - 2014

U2 - 10.1117/12.2052527

DO - 10.1117/12.2052527

M3 - Conference contribution

SN - 9781628410785

SP - 1

EP - 7

BT - Micro-Optics 2014

A2 - Thienpont, H

A2 - Mohr, J

A2 - Zappe, H

A2 - Nakajima, H

PB - SPIE

CY - Bellingham, WA, USA

T2 - Micro-Optics 2014, Brussels, Belgium

Y2 - 14 April 2014 through 16 April 2014

ER -

Belmonte PNA, de Lima Monteiro DW, de Oliveira Costa RF, French PJ, Pandraud G. Microfabrication and characterization of single-mask silicon microlens arrays for the IR spectra. In Thienpont H, Mohr J, Zappe H, Nakajima H, editors, Micro-Optics 2014. Bellingham, WA, USA: SPIE. 2014. p. 1-7. (Proceedings of SPIE- International Society for Optical Engineering). doi: 10.1117/12.2052527