Molecular Dynamics Simulations of Growth and Low-Energy Ion Polishing of Thin Molybdenum Films for EUV Multilayer Mirrors.

P Klaver, W Goedheer, F Bijkerk, BJ Thijsse

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    Original languageUndefined/Unknown
    Title of host publicationMaterials Research Society Symposium Proceedings.
    Pages305-312
    Number of pages8
    Publication statusPublished - 2000

    Publication series

    Name
    Name
    Volume585

    Keywords

    • ZX Int.klas.verslagjaar < 2002

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