Molecular Dynamics Simulations of Growth and Low-Energy Ion Polishing of Thin Molybdenum Films for EUV Multilayer Mirrors.

P Klaver, W Goedheer, F Bijkerk, BJ Thijsse

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Materials Research Society Symposium Proceedings.
Pages	305-312
Number of pages	8
Publication status	Published - 2000

Name

Name
Volume	585

ISSN 0272-9172

Keywords

@inproceedings{f8f74de7ef744c4a8df6d748af233084,

title = "Molecular Dynamics Simulations of Growth and Low-Energy Ion Polishing of Thin Molybdenum Films for EUV Multilayer Mirrors.",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "P Klaver and W Goedheer and F Bijkerk and BJ Thijsse",

note = "ISSN 0272-9172",

year = "2000",

language = "Undefined/Unknown",

pages = "305--312",

booktitle = "Materials Research Society Symposium Proceedings.",

}

TY - GEN

T1 - Molecular Dynamics Simulations of Growth and Low-Energy Ion Polishing of Thin Molybdenum Films for EUV Multilayer Mirrors.

AU - Klaver, P

AU - Goedheer, W

AU - Bijkerk, F

AU - Thijsse, BJ

N1 - ISSN 0272-9172

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SP - 305

EP - 312

BT - Materials Research Society Symposium Proceedings.

ER -