Molecular dynamics study of Cu thin films deposition on beta-Ta

TPC Klaver; BJ Thijsse

Molecular dynamics study of Cu thin films deposition on beta-Ta

TPC Klaver, BJ Thijsse

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Mat.Res.Soc.Proc.
Editors	Patrick W DeHaven, David P Field, Samuel D Harkness IV, John A Sutliff, Jerzy A Szpunar, Li Tang, Thomas Thomson, Mark D Vaudin
Place of Publication	Warrendale
Publisher	Materials Research Society
Pages	37-42
Number of pages	6
ISBN (Print)	1-55899-657-5
Publication status	Published - 2002
Event	MRS symposium, Warrendale, Pennsylvania, USA - Warrendale Duration: 1 Apr 2002 → 4 Apr 2002

Publication series

Name
Publisher	Materials Research Society

Name
Volume	721

Conference

Conference	MRS symposium, Warrendale, Pennsylvania, USA
Period	1/04/02 → 4/04/02

Keywords

Conf.proc. > 3 pag

Cite this

@inproceedings{7fd12d527a4b4025bd4b685987d3d8cd,

title = "Molecular dynamics study of Cu thin films deposition on beta-Ta",

keywords = "Conf.proc. > 3 pag",

author = "TPC Klaver and BJ Thijsse",

year = "2002",

language = "Undefined/Unknown",

isbn = "1-55899-657-5",

publisher = "Materials Research Society",

pages = "37--42",

editor = "DeHaven, {Patrick W} and Field, {David P} and {Harkness IV}, {Samuel D} and Sutliff, {John A} and Szpunar, {Jerzy A} and Li Tang and Thomas Thomson and Vaudin, {Mark D}",

booktitle = "Mat.Res.Soc.Proc.",

address = "United States",

note = "MRS symposium, Warrendale, Pennsylvania, USA ; Conference date: 01-04-2002 Through 04-04-2002",

}

Molecular dynamics study of Cu thin films deposition on beta-Ta. / Klaver, TPC; Thijsse, BJ.
Mat.Res.Soc.Proc.. ed. / Patrick W DeHaven; David P Field; Samuel D Harkness IV; John A Sutliff; Jerzy A Szpunar; Li Tang; Thomas Thomson; Mark D Vaudin. Warrendale: Materials Research Society, 2002. p. 37-42.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Molecular dynamics study of Cu thin films deposition on beta-Ta

AU - Klaver, TPC

AU - Thijsse, BJ

PY - 2002

Y1 - 2002

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 1-55899-657-5

SP - 37

EP - 42

BT - Mat.Res.Soc.Proc.

A2 - DeHaven, Patrick W

A2 - Field, David P

A2 - Harkness IV, Samuel D

A2 - Sutliff, John A

A2 - Szpunar, Jerzy A

A2 - Tang, Li

A2 - Thomson, Thomas

A2 - Vaudin, Mark D

PB - Materials Research Society

CY - Warrendale

T2 - MRS symposium, Warrendale, Pennsylvania, USA

Y2 - 1 April 2002 through 4 April 2002

ER -