Nano particle filtration module for lap on a chips devices

C Shen; HTM Pham; PM Sarro

doi:10.1109/MEMSYS.2010.5442394

Nano particle filtration module for lap on a chips devices

C Shen, HTM Pham, PM Sarro

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

3 Citations (Scopus)

Original language	English
Title of host publication	Proceedings IEEE MEMS 2010
Editors	Y. Suzuki, M. Wong
Place of Publication	Piscataway, NJ, USA
Publisher	IEEE Society
Pages	1067-1070
Number of pages	4
ISBN (Print)	978-1-4244-5763-2
DOIs	https://doi.org/10.1109/MEMSYS.2010.5442394
Publication status	Published - 2010
Event	IEEE MEMS 2010 - Piscataway, NJ, USA Duration: 24 Jan 2010 → 28 Jan 2010

Publication series

Name
Publisher	IEEE

Conference

Conference	IEEE MEMS 2010
Period	24/01/10 → 28/01/10

Keywords

Conf.proc. > 3 pag

Access to Document

10.1109/MEMSYS.2010.5442394

Cite this

@inproceedings{48af098ba69049008467dd07ee1c733c,

title = "Nano particle filtration module for lap on a chips devices",

keywords = "Conf.proc. > 3 pag",

author = "C Shen and HTM Pham and PM Sarro",

year = "2010",

doi = "10.1109/MEMSYS.2010.5442394",

language = "English",

isbn = "978-1-4244-5763-2",

publisher = "IEEE Society",

pages = "1067--1070",

editor = "Y. Suzuki and M. Wong",

booktitle = "Proceedings IEEE MEMS 2010",

note = "IEEE MEMS 2010 ; Conference date: 24-01-2010 Through 28-01-2010",

}

TY - GEN

T1 - Nano particle filtration module for lap on a chips devices

AU - Shen, C

AU - Pham, HTM

AU - Sarro, PM

PY - 2010

Y1 - 2010

KW - Conf.proc. > 3 pag

U2 - 10.1109/MEMSYS.2010.5442394

DO - 10.1109/MEMSYS.2010.5442394

M3 - Conference contribution

SN - 978-1-4244-5763-2

SP - 1067

EP - 1070

BT - Proceedings IEEE MEMS 2010

A2 - Suzuki, Y.

A2 - Wong, M.

PB - IEEE Society

CY - Piscataway, NJ, USA

T2 - IEEE MEMS 2010

Y2 - 24 January 2010 through 28 January 2010

ER -