Nanometer deep shaping with Fluid Jet Polishing

SM Booij, H van Brug, JJM Braat, OW Faehnle

Research output: Contribution to journalArticleScientificpeer-review

62 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)1926-1931
Number of pages6
JournalOptical Engineering
Volume41
Issue number8
Publication statusPublished - 2002

Keywords

  • ZX CWTS JFIS < 1.00

Cite this