Nanometer deep shaping with Fluid Jet Polishing

SM Booij, H van Brug, JJM Braat, OW Faehnle

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{bb6a77a4efce49aa81fb64c9bfa7fff8,

title = "Nanometer deep shaping with Fluid Jet Polishing",

keywords = "ZX CWTS JFIS < 1.00",

author = "SM Booij and {van Brug}, H and JJM Braat and OW Faehnle",

year = "2002",

language = "Undefined/Unknown",

volume = "41",

pages = "1926--1931",

journal = "Optical Engineering",

issn = "0091-3286",

publisher = "SPIE",

number = "8",

}