Noise suppression in buffer-state iterative learning control, applied to a high precision wafer stage

BG Dijkstra; OH Bosgra

Noise suppression in buffer-state iterative learning control, applied to a high precision wafer stage

BG Dijkstra, OH Bosgra

DISC

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	2002 IEEE international conference on control applications and international symposium on computer aided control systems design
Place of Publication	Piscataway
Publisher	IEEE Society
Pages	998-1003
Number of pages	6
ISBN (Print)	0-7803-7386-3
Publication status	Published - 2002
Event	2002 IEEE international conference on control applications and international symposium on computer aided control systems design - Glasgow, United Kingdom Duration: 18 Sept 2002 → 20 Sept 2002

Publication series

Name
Publisher	IEEE

Conference

Conference	2002 IEEE international conference on control applications and international symposium on computer aided control systems design
Country/Territory	United Kingdom
City	Glasgow
Period	18/09/02 → 20/09/02

Keywords

Conf.proc. > 3 pag

Cite this

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title = "Noise suppression in buffer-state iterative learning control, applied to a high precision wafer stage",

keywords = "Conf.proc. > 3 pag",

author = "BG Dijkstra and OH Bosgra",

year = "2002",

language = "Undefined/Unknown",

isbn = "0-7803-7386-3",

publisher = "IEEE Society",

pages = "998--1003",

booktitle = "2002 IEEE international conference on control applications and international symposium on computer aided control systems design",

note = "2002 IEEE international conference on control applications and international symposium on computer aided control systems design ; Conference date: 18-09-2002 Through 20-09-2002",

}

Dijkstra, BG & Bosgra, OH 2002, Noise suppression in buffer-state iterative learning control, applied to a high precision wafer stage. in 2002 IEEE international conference on control applications and international symposium on computer aided control systems design. IEEE Society, Piscataway, pp. 998-1003, 2002 IEEE international conference on control applications and international symposium on computer aided control systems design, Glasgow, United Kingdom, 18/09/02.

Noise suppression in buffer-state iterative learning control, applied to a high precision wafer stage. / Dijkstra, BG; Bosgra, OH.
2002 IEEE international conference on control applications and international symposium on computer aided control systems design. Piscataway: IEEE Society, 2002. p. 998-1003.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

TY - GEN

T1 - Noise suppression in buffer-state iterative learning control, applied to a high precision wafer stage

AU - Dijkstra, BG

AU - Bosgra, OH

PY - 2002

Y1 - 2002

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 0-7803-7386-3

SP - 998

EP - 1003

BT - 2002 IEEE international conference on control applications and international symposium on computer aided control systems design

PB - IEEE Society

CY - Piscataway

T2 - 2002 IEEE international conference on control applications and international symposium on computer aided control systems design

Y2 - 18 September 2002 through 20 September 2002

ER -