Noise suppression in buffer-state iterative learning control, applied to a high precision wafer stage

BG Dijkstra, OH Bosgra

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

11 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publication2002 IEEE international conference on control applications and international symposium on computer aided control systems design
Place of PublicationPiscataway
PublisherIEEE Society
Pages998-1003
Number of pages6
ISBN (Print)0-7803-7386-3
Publication statusPublished - 2002
Event2002 IEEE international conference on control applications and international symposium on computer aided control systems design - Glasgow, United Kingdom
Duration: 18 Sep 200220 Sep 2002

Publication series

Name
PublisherIEEE

Conference

Conference2002 IEEE international conference on control applications and international symposium on computer aided control systems design
CountryUnited Kingdom
CityGlasgow
Period18/09/0220/09/02

Keywords

  • Conf.proc. > 3 pag

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