Non-interferometric wavefront sensing technique for EUV Lithography system

A Polo; F Bociort; SF Pereira; HP Urbach

Non-interferometric wavefront sensing technique for EUV Lithography system

A Polo, F Bociort, SF Pereira, HP Urbach

ImPhys/Optics

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

1 Citation (Scopus)

Original language	English
Title of host publication	Proceedings symposium IEEE Photonics Benelux Chapter 2010
Editors	M Yousefi, M Mortensen, J Pozo, X Leijtens, HP Urbach
Place of Publication	Delft
Publisher	TNO, Delft
Pages	305-308
Number of pages	4
ISBN (Print)	9789078314158
Publication status	Published - 2010
Event	IEEE Photonics Benelux Chapter 2010 - Delft Duration: 18 Nov 2010 → 19 Nov 2010

Publication series

Name
Publisher	TNO

Conference

Conference	IEEE Photonics Benelux Chapter 2010
Period	18/11/10 → 19/11/10

Keywords

Conf.proc. > 3 pag

Cite this

@inproceedings{f6bcf53dfcb44272b9fc4c860e90fe63,

title = "Non-interferometric wavefront sensing technique for EUV Lithography system",

keywords = "Conf.proc. > 3 pag",

author = "A Polo and F Bociort and SF Pereira and HP Urbach",

year = "2010",

language = "English",

isbn = "9789078314158",

publisher = "TNO, Delft",

pages = "305--308",

editor = "M Yousefi and M Mortensen and J Pozo and X Leijtens and HP Urbach",

booktitle = "Proceedings symposium IEEE Photonics Benelux Chapter 2010",

note = "IEEE Photonics Benelux Chapter 2010 ; Conference date: 18-11-2010 Through 19-11-2010",

}

Non-interferometric wavefront sensing technique for EUV Lithography system. / Polo, A; Bociort, F ; Pereira, SF et al.
Proceedings symposium IEEE Photonics Benelux Chapter 2010. ed. / M Yousefi; M Mortensen; J Pozo; X Leijtens; HP Urbach. Delft: TNO, Delft, 2010. p. 305-308.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Non-interferometric wavefront sensing technique for EUV Lithography system

AU - Polo, A

AU - Bociort, F

AU - Pereira, SF

AU - Urbach, HP

PY - 2010

Y1 - 2010

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 9789078314158

SP - 305

EP - 308

BT - Proceedings symposium IEEE Photonics Benelux Chapter 2010

A2 - Yousefi, M

A2 - Mortensen, M

A2 - Pozo, J

A2 - Leijtens, X

A2 - Urbach, HP

PB - TNO, Delft

CY - Delft

T2 - IEEE Photonics Benelux Chapter 2010

Y2 - 18 November 2010 through 19 November 2010

ER -