Observer development for automatic STEM closed-loop control

A Tejada Ruiz, AJ den Dekker, SW van der Hoeven

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Pages (from-to)1096-1097
Number of pages2
JournalMicroscopy and Microanalysis
Volume15
Issue numbers2
Publication statusPublished - 2009

Keywords

  • CWTS JFIS < 0.75

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