On the Mechanisms Governing Aluminum-Mediated Solid-Phase Epitaxy of Silicon

Y Civale, G Vastola, LK Nanver, R Mary-Joy, JR Kim

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	2052-2062
Number of pages	11
Journal	Journal of Electronic Materials
Volume	38
Issue number	10
DOIs	https://doi.org/DOI: 10.1007/s11664-009-0877-1
Publication status	Published - 2009

Keywords

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T1 - On the Mechanisms Governing Aluminum-Mediated Solid-Phase Epitaxy of Silicon

AU - Civale, Y

AU - Vastola, G

AU - Nanver, LK

AU - Mary-Joy, R

AU - Kim, JR

PY - 2009

Y1 - 2009

KW - CWTS JFIS < 0.75

U2 - DOI: 10.1007/s11664-009-0877-1

DO - DOI: 10.1007/s11664-009-0877-1

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VL - 38

SP - 2052

EP - 2062

JO - Journal of Electronic Materials

JF - Journal of Electronic Materials

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