On the Mechanisms Governing Aluminum-Mediated Solid-Phase Epitaxy of Silicon

Y Civale, G Vastola, LK Nanver, R Mary-Joy, JR Kim

Research output: Contribution to journalArticleScientificpeer-review

9 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)2052-2062
Number of pages11
JournalJournal of Electronic Materials
Volume38
Issue number10
DOIs
Publication statusPublished - 2009

Keywords

  • CWTS JFIS < 0.75

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