Optical and surface properties of ALD TiO2 thin films and laminate layers for sensing applications

Y Huang; PM Sarro

Optical and surface properties of ALD TiO2 thin films and laminate layers for sensing applications

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Professional

Original language	Undefined/Unknown
Title of host publication	Proceedings of 12th Annual Workshop on Semiconductors Advances for Future Electronics and Sensors (SAFE)
Editors	PJ French
Place of Publication	Veldhoven, the Netherlands
Publisher	STW Technology Foundation
Pages	24-27
Number of pages	4
ISBN (Print)	978-90-73461-62-8
Publication status	Published - 2009
Event	12th Annual Workshop on Semiconductors Advances for Future Electronics and Sensors (SAFE) - Veldhoven, the Netherlands Duration: 26 Nov 2009 → 27 Nov 2009

Publication series

Name
Publisher	STW Technology Foundation

Conference

Conference	12th Annual Workshop on Semiconductors Advances for Future Electronics and Sensors (SAFE)
Period	26/11/09 → 27/11/09

Keywords

Vakpubl., Overig wet. > 3 pag

Cite this

@inproceedings{da819352812a44799684ae68e91ed687,

title = "Optical and surface properties of ALD TiO2 thin films and laminate layers for sensing applications",

keywords = "Vakpubl., Overig wet. > 3 pag",

author = "Y Huang and PM Sarro",

year = "2009",

language = "Undefined/Unknown",

isbn = "978-90-73461-62-8",

publisher = "STW Technology Foundation",

pages = "24--27",

editor = "PJ French",

booktitle = "Proceedings of 12th Annual Workshop on Semiconductors Advances for Future Electronics and Sensors (SAFE)",

note = "null ; Conference date: 26-11-2009 Through 27-11-2009",

}

Huang, Y & Sarro, PM 2009, Optical and surface properties of ALD TiO2 thin films and laminate layers for sensing applications. in PJ French (ed.), Proceedings of 12th Annual Workshop on Semiconductors Advances for Future Electronics and Sensors (SAFE). STW Technology Foundation, Veldhoven, the Netherlands, pp. 24-27, 12th Annual Workshop on Semiconductors Advances for Future Electronics and Sensors (SAFE), 26/11/09.

Optical and surface properties of ALD TiO2 thin films and laminate layers for sensing applications. / Huang, Y; Sarro, PM.

Proceedings of 12th Annual Workshop on Semiconductors Advances for Future Electronics and Sensors (SAFE). ed. / PJ French. Veldhoven, the Netherlands : STW Technology Foundation, 2009. p. 24-27.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Professional

TY - GEN

T1 - Optical and surface properties of ALD TiO2 thin films and laminate layers for sensing applications

AU - Huang, Y

AU - Sarro, PM

PY - 2009

Y1 - 2009

KW - Vakpubl., Overig wet. > 3 pag

M3 - Conference contribution

SN - 978-90-73461-62-8

SP - 24

EP - 27

BT - Proceedings of 12th Annual Workshop on Semiconductors Advances for Future Electronics and Sensors (SAFE)

A2 - French, PJ

PB - STW Technology Foundation

CY - Veldhoven, the Netherlands

Y2 - 26 November 2009 through 27 November 2009

ER -