Optical characterization of silicon-compatible materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings
Editors	RF Wolffenbuttel, DDL Wijngaards, van CJ Mullem
Place of Publication	S.l.
Publisher	s.n.
Pages	79-90
Number of pages	12
ISBN (Print)	90-9014166-9
Publication status	Published - 2000
Event	Symposium on Microtechnology in Metrology and Metrology in Microsystems, Delft - S.l. Duration: 31 Aug 2000 → 1 Sept 2000

Name
Publisher	S.n.

Conference	Symposium on Microtechnology in Metrology and Metrology in Microsystems, Delft
Period	31/08/00 → 1/09/00

Keywords

@inproceedings{8ca933ee61b2437f802f9f7f386c44c1,

title = "Optical characterization of silicon-compatible materials",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "RF Wolffenbuttel",

year = "2000",

language = "Undefined/Unknown",

isbn = "90-9014166-9",

publisher = "s.n.",

pages = "79--90",

editor = "{RF Wolffenbuttel} and {DDL Wijngaards} and {CJ Mullem}, van",

booktitle = "Proceedings",

note = "Symposium on Microtechnology in Metrology and Metrology in Microsystems, Delft ; Conference date: 31-08-2000 Through 01-09-2000",

}

TY - GEN

T1 - Optical characterization of silicon-compatible materials

AU - Wolffenbuttel, RF

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 90-9014166-9

SP - 79

EP - 90

BT - Proceedings

A2 - RF Wolffenbuttel, null

A2 - DDL Wijngaards, null

A2 - CJ Mullem, van

PB - s.n.

CY - S.l.

T2 - Symposium on Microtechnology in Metrology and Metrology in Microsystems, Delft

Y2 - 31 August 2000 through 1 September 2000

ER -