Optimization of extreme ultraviolet mirror systems comprising high-order aspheric surfaces

OE Marinescu, F Bociort

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{359259b6ea5440559351fbb352fa986d,

title = "Optimization of extreme ultraviolet mirror systems comprising high-order aspheric surfaces",

keywords = "professional journal papers, CWTS JFIS < 0.75",

author = "OE Marinescu and F Bociort",

year = "2008",

language = "Undefined/Unknown",

volume = "47",

pages = "033004--1--0330044--6",

journal = "Optical Engineering",

issn = "0091-3286",

publisher = "SPIE",

}