Oxygen related defects in the top silicon layer of SIMOX; the effect of thermal treatments.

A Rivera, JMM de Nijs, p Balk, A van Veen, H Schut, PFA Alkemade

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	77-81
Number of pages	5
Journal	Materials Science and Engineering B: Advanced Functional Solid-state Materials
Volume	73
Publication status	Published - 2000

Keywords

@article{0701265ddd5d4ab7aac3b9b954839403,

title = "Oxygen related defects in the top silicon layer of SIMOX; the effect of thermal treatments.",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "A Rivera and {de Nijs}, JMM and p Balk and {van Veen}, A and H Schut and PFA Alkemade",

year = "2000",

language = "Undefined/Unknown",

volume = "73",

pages = "77--81",

journal = "Materials Science and Engineering B: Advanced Functional Solid-state Materials",

issn = "0921-5107",

publisher = "Elsevier",

}

TY - JOUR

T1 - Oxygen related defects in the top silicon layer of SIMOX; the effect of thermal treatments.

AU - Rivera, A

AU - de Nijs, JMM

AU - Balk, p

AU - van Veen, A

AU - Schut, H

AU - Alkemade, PFA

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Article

SN - 0921-5107

VL - 73

SP - 77

EP - 81

JO - Materials Science and Engineering B: Advanced Functional Solid-state Materials

JF - Materials Science and Engineering B: Advanced Functional Solid-state Materials

ER -