Parallel, miniaturized scanning probe microscope for defect inspection and review

H Sadeghian Marnani; TC van den Dool; WE Crowcombe; RW Herfst; J Winters; GFIJ Kramer; NB Koster

doi:10.1117/12.2045557

Parallel, miniaturized scanning probe microscope for defect inspection and review

H Sadeghian Marnani, TC van den Dool, WE Crowcombe, RW Herfst, J Winters, GFIJ Kramer, NB Koster

Computational Design and Mechanics

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

14 Citations (Scopus)

Original language	English
Title of host publication	Metrology, Inspection, and Process Control for Microlithography XXVIII
Editors	JP Cain, MI Sanchez
Place of Publication	Bellingham, WA, USA
Publisher	SPIE
Pages	90501B-1-90501B-7
ISBN (Print)	9780819499738
DOIs	https://doi.org/10.1117/12.2045557
Publication status	Published - 2014
Event	International Conference on Metrology, Inspection, and Process Control for Microlithography XXVIII, San Jose, California, USA - Bellingham, WA, USA Duration: 24 Feb 2014 → 27 Feb 2014

Publication series

Name
Publisher	SPIE

Name	Proceedings of SPIE- International Society for Optical Engineering
Volume	9050
ISSN (Print)	0277-786X

Conference

Conference	International Conference on Metrology, Inspection, and Process Control for Microlithography XXVIII, San Jose, California, USA
Period	24/02/14 → 27/02/14

Bibliographical note

NEO

Access to Document

10.1117/12.2045557

Cite this

Sadeghian Marnani, H., van den Dool, TC., Crowcombe, WE., Herfst, RW., Winters, J., Kramer, GFIJ., & Koster, NB. (2014). Parallel, miniaturized scanning probe microscope for defect inspection and review. In JP. Cain, & MI. Sanchez (Eds.), Metrology, Inspection, and Process Control for Microlithography XXVIII (pp. 90501B-1-90501B-7). (Proceedings of SPIE- International Society for Optical Engineering; Vol. 9050). SPIE. https://doi.org/10.1117/12.2045557

Sadeghian Marnani, H ; van den Dool, TC ; Crowcombe, WE et al. / Parallel, miniaturized scanning probe microscope for defect inspection and review. Metrology, Inspection, and Process Control for Microlithography XXVIII. editor / JP Cain ; MI Sanchez. Bellingham, WA, USA : SPIE, 2014. pp. 90501B-1-90501B-7 (Proceedings of SPIE- International Society for Optical Engineering).

@inproceedings{37fde95f751445e19f754dcf392dc33d,

title = "Parallel, miniaturized scanning probe microscope for defect inspection and review",

author = "{Sadeghian Marnani}, H and {van den Dool}, TC and WE Crowcombe and RW Herfst and J Winters and GFIJ Kramer and NB Koster",

note = "NEO; International Conference on Metrology, Inspection, and Process Control for Microlithography XXVIII, San Jose, California, USA ; Conference date: 24-02-2014 Through 27-02-2014",

year = "2014",

doi = "10.1117/12.2045557",

language = "English",

isbn = "9780819499738",

publisher = "SPIE",

pages = "90501B--1--90501B--7",

editor = "JP Cain and MI Sanchez",

booktitle = "Metrology, Inspection, and Process Control for Microlithography XXVIII",

address = "United States",

}

Sadeghian Marnani, H, van den Dool, TC, Crowcombe, WE, Herfst, RW, Winters, J, Kramer, GFIJ & Koster, NB 2014, Parallel, miniaturized scanning probe microscope for defect inspection and review. in JP Cain & MI Sanchez (eds), Metrology, Inspection, and Process Control for Microlithography XXVIII. Proceedings of SPIE- International Society for Optical Engineering, vol. 9050, SPIE, Bellingham, WA, USA, pp. 90501B-1-90501B-7, International Conference on Metrology, Inspection, and Process Control for Microlithography XXVIII, San Jose, California, USA, 24/02/14. https://doi.org/10.1117/12.2045557

Parallel, miniaturized scanning probe microscope for defect inspection and review. / Sadeghian Marnani, H; van den Dool, TC; Crowcombe, WE et al.
Metrology, Inspection, and Process Control for Microlithography XXVIII. ed. / JP Cain; MI Sanchez. Bellingham, WA, USA: SPIE, 2014. p. 90501B-1-90501B-7 (Proceedings of SPIE- International Society for Optical Engineering; Vol. 9050).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Parallel, miniaturized scanning probe microscope for defect inspection and review

AU - Sadeghian Marnani, H

AU - van den Dool, TC

AU - Crowcombe, WE

AU - Herfst, RW

AU - Winters, J

AU - Kramer, GFIJ

AU - Koster, NB

N1 - NEO

PY - 2014

Y1 - 2014

UR - http://resolver.tudelft.nl/uuid:5e570b1c-2442-45a8-b0f9-8403f83a00a3

U2 - 10.1117/12.2045557

DO - 10.1117/12.2045557

M3 - Conference contribution

SN - 9780819499738

SP - 90501B-1-90501B-7

BT - Metrology, Inspection, and Process Control for Microlithography XXVIII

A2 - Cain, JP

A2 - Sanchez, MI

PB - SPIE

CY - Bellingham, WA, USA

T2 - International Conference on Metrology, Inspection, and Process Control for Microlithography XXVIII, San Jose, California, USA

Y2 - 24 February 2014 through 27 February 2014

ER -

Sadeghian Marnani H, van den Dool TC, Crowcombe WE, Herfst RW, Winters J, Kramer GFIJ et al. Parallel, miniaturized scanning probe microscope for defect inspection and review. In Cain JP, Sanchez MI, editors, Metrology, Inspection, and Process Control for Microlithography XXVIII. Bellingham, WA, USA: SPIE. 2014. p. 90501B-1-90501B-7. (Proceedings of SPIE- International Society for Optical Engineering). doi: 10.1117/12.2045557

Parallel, miniaturized scanning probe microscope for defect inspection and review

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Conference

Bibliographical note

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