Parallel, miniaturized scanning probe microscope for defect inspection and review

H Sadeghian Marnani, TC van den Dool, WE Crowcombe, RW Herfst, J Winters, GFIJ Kramer, NB Koster

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

14 Citations (Scopus)
Original languageEnglish
Title of host publicationMetrology, Inspection, and Process Control for Microlithography XXVIII
EditorsJP Cain, MI Sanchez
Place of PublicationBellingham, WA, USA
PublisherSPIE
Pages90501B-1-90501B-7
ISBN (Print)9780819499738
DOIs
Publication statusPublished - 2014
EventInternational Conference on Metrology, Inspection, and Process Control for Microlithography XXVIII, San Jose, California, USA - Bellingham, WA, USA
Duration: 24 Feb 201427 Feb 2014

Publication series

Name
PublisherSPIE
NameProceedings of SPIE- International Society for Optical Engineering
Volume9050
ISSN (Print)0277-786X

Conference

ConferenceInternational Conference on Metrology, Inspection, and Process Control for Microlithography XXVIII, San Jose, California, USA
Period24/02/1427/02/14

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