Parameter retrieval of small particles in dark-field Fourier ptychography and a rectangle in real-space ptychography

Xukang Wei*, H. Paul Urbach, Peter van der Walle, Wim M.J. Coene

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)
13 Downloads (Pure)

Abstract

We present a parameter retrieval method which incorporates prior knowledge about the object into ptychography. The proposed method is applied to two applications: (1) parameter retrieval of small particles from Fourier ptychographic dark field measurements; (2) parameter retrieval of a rectangular structure with real-space ptychography. The influence of Poisson noise is discussed in the second part of the paper. The Cramér Rao Lower Bound in both applications is computed and Monte Carlo analysis is used to verify the calculated lower bound. With the computation results we report the lower bound for various noise levels and analyze the correlation of particles in application 1. For application 2 the correlation of parameters of the rectangular structure is discussed.

Original languageEnglish
Article number113335
Number of pages11
JournalUltramicroscopy
Volume229
DOIs
Publication statusPublished - 2021

Keywords

  • Cramér Rao Lower Bound
  • Parameterization
  • Poisson noise
  • Ptychograhy

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