Pattern transfer on a vertical cavity sidewall using SU8

T Verhaar, J Wei, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

16 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)074018-1-074018-6
JournalJournal of Micromechanics and Microengineering
Volume19
Publication statusPublished - 2009

Keywords

  • CWTS 0.75 <= JFIS < 2.00

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