Pattern transfer on a vertical cavity sidewall using SU8

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	074018-1-074018-6
Journal	Journal of Micromechanics and Microengineering
Volume	19
Publication status	Published - 2009

Keywords

@article{26304e03f38d403985a01a32a98a45a8,

title = "Pattern transfer on a vertical cavity sidewall using SU8",

keywords = "CWTS 0.75 <= JFIS < 2.00",

author = "T Verhaar and J Wei and PM Sarro",

year = "2009",

language = "Undefined/Unknown",

volume = "19",

pages = "074018--1--074018--6",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

}