@inproceedings{b2a96bbd32834e2aae2177bd2053f5a2,
title = "Patterning of polyimide and metal in deep grooves",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "VG Kiutchoukov and JR Mollinger and A Bossche",
year = "2000",
language = "Undefined/Unknown",
isbn = "87-89935-50-0",
publisher = "Mikroelektronik Centret",
pages = "467--470",
editor = "{R Reus}, de and {S Bouwstra}",
booktitle = "Eurosensors XIV",
note = "14th European Conference on Solid-State Transducers, Copenhagen ; Conference date: 27-08-2000 Through 30-08-2000",
}