Phase retrieval between overlapping orders in coherent Fourier scatterometry using scanning

Research output: Contribution to journal › Article › Scientific › peer-review

16 Citations (Scopus)

Original language	English
Pages (from-to)	1-8
Number of pages	8
Journal	Journal of the European Optical Society - Rapid Publications
Volume	8
DOIs	https://doi.org/10.2971/jeos.2013.13048
Publication status	Published - 2013

13048-1 t/m 13048-8

Keywords

@article{07baf216464b47849ed6a7f6da4473c4,

title = "Phase retrieval between overlapping orders in coherent Fourier scatterometry using scanning",

keywords = "CWTS JFIS < 0.75",

author = "N Kumar and {El Gawhary}, O and S Roy and HP Urbach",

note = "13048-1 t/m 13048-8",

year = "2013",

doi = "10.2971/jeos.2013.13048",

language = "English",

volume = "8",

pages = "1--8",

journal = "Journal of the European Optical Society - Rapid Publications",

issn = "1990-2573",

publisher = "IOP Publishing",

}

TY - JOUR

T1 - Phase retrieval between overlapping orders in coherent Fourier scatterometry using scanning

AU - Kumar, N

AU - El Gawhary, O

AU - Roy, S

AU - Urbach, HP

N1 - 13048-1 t/m 13048-8

PY - 2013

Y1 - 2013

KW - CWTS JFIS < 0.75

U2 - 10.2971/jeos.2013.13048

DO - 10.2971/jeos.2013.13048

M3 - Article

SN - 1990-2573

VL - 8

SP - 1

EP - 8

JO - Journal of the European Optical Society - Rapid Publications

JF - Journal of the European Optical Society - Rapid Publications

ER -