Phase retrieval between overlapping orders in coherent Fourier scatterometry using scanning

N Kumar, O El Gawhary, S Roy, HP Urbach

Research output: Contribution to journalArticleScientificpeer-review

12 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-8
Number of pages8
JournalJournal of the European Optical Society - Rapid Publications
Volume8
DOIs
Publication statusPublished - 2013

Keywords

  • CWTS JFIS < 0.75

Cite this