PMUT and CMUT Devices for Biomedical Applications: A Review

Elisabetta  Moisello; Lara  Novaresi; Eshani Sarkar; Piero  Malcovati; Tiago L. Costa; Edoardo Bonizzoni

doi:10.1109/ACCESS.2024.3359906

PMUT and CMUT Devices for Biomedical Applications: A Review

Elisabetta Moisello^*, Lara Novaresi, Eshani Sarkar, Piero Malcovati, Tiago L. Costa, Edoardo Bonizzoni

^*Corresponding author for this work

Bio-Electronics

Research output: Contribution to journal › Review article › peer-review

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Abstract

Piezoelectric Micromachined Ultrasonic Transducers (PMUT) and Capacitive Micromachined Ultrasonic Transducers (CMUT) have seen great developments in recent years, both in terms of performance and scope of applications within the biomedical ultrasound domain. This paper presents a review of the state-of-the-art of PMUT and CMUT technologies, focusing on their principle of operation, microfabrication techniques and use in different biomedical imaging and therapeutic applications. The advantages and drawbacks of PMUT and CMUT technologies in comparison with conventional bulk transducers are highlighted, the trade-offs among PMUTs and CMUTs are discussed, and their relevance in the current landscape of medical diagnostics and therapeutic uses is outlined, thus providing a clear overview of these promising technologies for the present and the next generation biomedical ultrasound applications.

Original language	English
Pages (from-to)	18640-18657
Number of pages	18
Journal	IEEE Access
Volume	12
DOIs	https://doi.org/10.1109/ACCESS.2024.3359906
Publication status	Published - 2024

Keywords

PMUT
CMUT
Ultrasound imaging
PAI
neuromodulation
biomedical

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10.1109/ACCESS.2024.3359906

PMUT_and_CMUT_Devices_for_Biomedical_Applications_A_ReviewFinal published version, 1.23 MBLicence: CC BY-NC-ND

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title = "PMUT and CMUT Devices for Biomedical Applications: A Review",

abstract = "Piezoelectric Micromachined Ultrasonic Transducers (PMUT) and Capacitive Micromachined Ultrasonic Transducers (CMUT) have seen great developments in recent years, both in terms of performance and scope of applications within the biomedical ultrasound domain. This paper presents a review of the state-of-the-art of PMUT and CMUT technologies, focusing on their principle of operation, microfabrication techniques and use in different biomedical imaging and therapeutic applications. The advantages and drawbacks of PMUT and CMUT technologies in comparison with conventional bulk transducers are highlighted, the trade-offs among PMUTs and CMUTs are discussed, and their relevance in the current landscape of medical diagnostics and therapeutic uses is outlined, thus providing a clear overview of these promising technologies for the present and the next generation biomedical ultrasound applications.",

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author = "Elisabetta Moisello and Lara Novaresi and Eshani Sarkar and Piero Malcovati and Costa, {Tiago L.} and Edoardo Bonizzoni",

year = "2024",

doi = "10.1109/ACCESS.2024.3359906",

language = "English",

volume = "12",

pages = "18640--18657",

journal = "IEEE Access",

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T2 - A Review

AU - Moisello, Elisabetta

AU - Novaresi, Lara

AU - Sarkar, Eshani

AU - Malcovati, Piero

AU - Costa, Tiago L.

AU - Bonizzoni, Edoardo

PY - 2024

Y1 - 2024

N2 - Piezoelectric Micromachined Ultrasonic Transducers (PMUT) and Capacitive Micromachined Ultrasonic Transducers (CMUT) have seen great developments in recent years, both in terms of performance and scope of applications within the biomedical ultrasound domain. This paper presents a review of the state-of-the-art of PMUT and CMUT technologies, focusing on their principle of operation, microfabrication techniques and use in different biomedical imaging and therapeutic applications. The advantages and drawbacks of PMUT and CMUT technologies in comparison with conventional bulk transducers are highlighted, the trade-offs among PMUTs and CMUTs are discussed, and their relevance in the current landscape of medical diagnostics and therapeutic uses is outlined, thus providing a clear overview of these promising technologies for the present and the next generation biomedical ultrasound applications.

AB - Piezoelectric Micromachined Ultrasonic Transducers (PMUT) and Capacitive Micromachined Ultrasonic Transducers (CMUT) have seen great developments in recent years, both in terms of performance and scope of applications within the biomedical ultrasound domain. This paper presents a review of the state-of-the-art of PMUT and CMUT technologies, focusing on their principle of operation, microfabrication techniques and use in different biomedical imaging and therapeutic applications. The advantages and drawbacks of PMUT and CMUT technologies in comparison with conventional bulk transducers are highlighted, the trade-offs among PMUTs and CMUTs are discussed, and their relevance in the current landscape of medical diagnostics and therapeutic uses is outlined, thus providing a clear overview of these promising technologies for the present and the next generation biomedical ultrasound applications.

KW - PMUT

KW - CMUT

KW - Ultrasound imaging

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JO - IEEE Access

JF - IEEE Access

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PMUT and CMUT Devices for Biomedical Applications: A Review

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