| Original language | Undefined/Unknown |
|---|---|
| Pages (from-to) | 823-831 |
| Number of pages | 9 |
| Journal | IEEE Journal of Microelectromechanical Systems |
| Volume | 17 |
| Issue number | 4 |
| Publication status | Published - 2008 |
Keywords
- academic journal papers
- CWTS JFIS >= 2.00
Polimeric thermal microactuator with embedded silicon skeleton, Part II: Fabrication, characterization and application for 2DOF microgripper
T Chu Duc, GK Lau, PM Sarro
Research output: Contribution to journal › Article › Scientific › peer-review