Polimeric thermal microactuator with embedded silicon skeleton, Part II: Fabrication, characterization and application for 2DOF microgripper

T Chu Duc, GK Lau, PM Sarro

Research output: Contribution to journalArticlepeer-review

Original languageUndefined/Unknown
Pages (from-to)823-831
Number of pages9
JournalIEEE Journal of Microelectromechanical Systems
Volume17
Issue number4
Publication statusPublished - 2008

Keywords

  • academic journal papers
  • CWTS JFIS >= 2.00

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