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Poly-SiOx Passivating Contacts with Plasma-Assisted N2O Oxidation of Silicon (PANO-SiOx)
Zhirong Yao*, Guangtao Yang, Can Han, Paul Procel Moya, Engin Özkol, Jin Yan, Yifeng Zhao, Liqi Cao, René van Swaaij, Luana Mazzarella, Olindo Isabella
*Corresponding author for this work
Research output: Contribution to journal › Article › Scientific › peer-review
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