Positron beam and Raman analysis of hydrogen plasma treated and annealed Cz-Si

H Schut, A van Veen, SWH Eijt, R Job, AG Ulyasin, WR Fahrner

    Research output: Contribution to journalArticleScientificpeer-review

    14 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)94-99
    Number of pages6
    JournalNuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
    Publication statusPublished - 2002


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