@inproceedings{1b6ca4f0c2e44eb4aba955a62a20f45b,
title = "Post processing of linear variable optical filter on CMOS chip at die-level",
keywords = "Conf.proc. > 3 pag",
author = "A Emadi and H Wu and {de Graaf}, G and RF Wolffenbuttel",
year = "2010",
language = "English",
publisher = "MME",
pages = "185--188",
editor = "{van Honschoten}, J and H Verputten and H Groenland",
booktitle = "Proceedings of 21st Micromechanics and Microsystems Europe 2010 Conference",
note = " MME 2010 : Micromechanics and Microsystems Europe Workshop ; Conference date: 26-09-2010 Through 29-09-2010",
}