Power-efficient high-speed and high-resolution capacitive-sensor interface for subnanometer displacement measurements

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26 Citations (Scopus)

Original language	English
Pages (from-to)	1315-1322
Number of pages	8
Journal	IEEE Transactions on Instrumentation and Measurement
Volume	61
Issue number	5
DOIs	https://doi.org/10.1109/TIM.2011.2178678
Publication status	Published - 2012

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Article number: 6151147

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title = "Power-efficient high-speed and high-resolution capacitive-sensor interface for subnanometer displacement measurements",

author = "S Xia and S Nihtianov",

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AU - Nihtianov, S

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