Power-efficient high-speed and high-resolution capacitive-sensor interface for subnanometer displacement measurements

Research output: Contribution to journalArticleScientificpeer-review

25 Citations (Scopus)
Original languageEnglish
Pages (from-to)1315-1322
Number of pages8
JournalIEEE Transactions on Instrumentation and Measurement
Volume61
Issue number5
DOIs
Publication statusPublished - 2012

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